AGGLOMERATION OF COBALT SILICIDE FILMS
AGGLOMERATION OF COBALT SILICIDE FILMS Z.G. XIAO 1, G.A. ROZGONYI, C.A. CANOVAI 2, AND C.M. OSBURN '3 I N. C. State University, Dept. of Materials Science and Engineering, Raleigh, NC 27695 ... Co film thickness was investigated by TEM, XRD, and four-point-probe measurements. It was
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